Vacuum Valves

Vacuum valves are used to control the passage and flow of gas within a vacuum system. An isolation valve, also called a shut-off valve, stops gas flow to a section of a vacuum system for the purpose of isolating a vacuum line, load lock, or chamber. They are also used for directing flow from one path to another and connecting components and equipment to a vacuum system.

 

ANCORP offers a wide selection of gate valves, angle valves, and ball valves suitable for a variety of vacuum applications from rough and HV industrial, semiconductor, and coating processes to UHV and XHV systems for research and development.

 

Ball Valves

High vacuum ball valves are well suited to harsh and particulate-rich environments. Ball valves have a simple design consisting of a body, stem, ball, and flanged end caps. The valve is opened and closed by turning the stem 90 degrees. The corrosive resistant, fast actuating design of ANCORP’s industry-leading high vacuum ball valves makes them ideal for isolating reactors, traps, and scrubbers on vacuum process tools.

 

Gate Valves

Gate Valves provide straight through, unimpeded flow with a slim valve body profile. Gate valves are ideal for space constrained applications that require maximum conductance. Gate valves utilize a central carriage or gate that is raised and lowered by the actuator in the body. ANCORP is a North American distributor of VAT vacuum gate valves.

 

Angle Valves

Angle valves, also called poppet valves, are made of a body, actuator, and internal poppet. The internal poppet is transported linearly to open and close the valve. Angle valves are excellent lower cost valves for isolation in rough vacuum through extreme high vacuum (XHV). ANCORP is a North American distributor of VAT vacuum angle valves.

 

Custom Valves and Additional Options

If you are in need of a customized vacuum valve or a valve type that is not listed on our website, please contact us or request a quote by clicking the button below to speak with a sales engineer about your requirements.