Vacuum Feedthroughs

A vacuum feedthrough facilitates the transfer of power, motion, fluids, or gases into a vacuum chamber from the outside. Vacuum feedthroughs are hermetically sealed to maintain your high vacuum or ultra-high vacuum environment when in use. ANCORP’s selection of hermetic feedthroughs includes electrical feedthroughs, fluid and gas feedthroughs, rotary motion feedthroughs, and transition feedthroughs.

 

Electrical Feedthroughs

ANCORP’s electrical feedthroughs are used to transfer low voltage, high current energy into a vacuum system to power deposition sources and other equipment. Available types include 400-amp high current feedthroughs and 1,000-amp water-cooled high current feedthroughs.

 

Fluid and Gas Feedthroughs

Fluid and gas feedthroughs are used to transmit fluids, cryogenic cooling agents, and gases into a vacuum system. Multiple tube designs and flange configurations are available for HV and UHV use with cryogenic and non-cryogenic substances.

 

Rotary Motion Feedthroughs

Rotary motion feedthroughs allow the rotation of instruments and equipment inside a vacuum system. Both elastomer-sealed and ferro-sealed rotary motion feedthroughs are available for low RPM and high RPM applications, respectively.

 

Transition Feedthroughs

Transition feedthroughs, also called baseplate feedthroughs, are used for adding ports or attaching equipment directly to your chamber or a baseplate port. Uses include attaching a vacuum measurement device, adding a gas backfill line, adding a flange, blanking-off a port, or mounting metal or glass tubing.